EE Times: Moore's Law Could Ride EUV for 10 More Years.
[1]https://www.eetimes.com/moores-law-could-ride-euv-for-10-more-years/

   Jim Bell's comment:

   Less than 2 nanometers feature sizes

   Note: the diameter of a silicon atom is 0.2 nanometers.

References

   1. https://www.eetimes.com/moores-law-could-ride-euv-for-10-more-years/